Semiconductor substrate with transistors having different threshold voltages

ABSTRACT

A method of creating a semiconductor integrated circuit is disclosed. The method includes forming a first field effect transistor (FET) device and a second FET device on a semiconductor substrate. The method includes epitaxially growing raised source/drain (RSD) structures for the first FET device at a first height. The method includes epitaxially growing raised source/drain (RSD) structures for the second FET device at a second height. The second height is greater than the first height such that a threshold voltage of the second FET device is greater than a threshold voltage of the first FET device.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a continuation of U.S. patent application Ser. No.13/463,402, filed May 3, 2012, the disclosure of which is incorporatedby reference herein in its entirety.

BACKGROUND

The present invention generally relates to semiconductor devices, andmore specifically, to a semiconductor substrate having transistors withdifferent threshold voltage values.

A system-on-chip (SOC) application may require various sets oftransistors to achieve a balance between power and performance. Deviceshaving varying threshold voltages V_(t) may be needed in an SOCapplication to meet different performance and power requirements. Thethreshold voltage V_(t) is a function of a number of parametersincluding channel length, gate material, gate insulation material andthickness, and the channel doping concentration.

In silicon-on-insulator (SOI) fabrication technology, transistors arebuilt on a relatively thin silicon layer (or any other semiconductingmaterial). The silicon layer rests on an insulating layer, usuallyconstructed of silicon dioxide (SiO₂), and may be referred to as aburied oxide or BOX. Extremely thin SOI (ETSOI) devices generally have asilicon layer (also referred to as an ETSOI layer) with a thickness thatis usually about 20 nanometers (nm) or less. Due to the limitedthickness of the ETSOI layer, channel doping is generally less effectivein ETSOI devices. However, the threshold voltage V_(t) is dependent onthe level of channel doping concentration. In one alternative approachto doping, an ETSOI application with transistors having varyingthreshold voltages V_(t) may be created by using different gate stackstructures. However, creating different gate stack structures on asingle substrate may have severe process integration limitationsespecially when the difference in different threshold voltage V_(t)devices are around 100 mV.

SUMMARY

According to one embodiment, a method of creating a semiconductorintegrated circuit is provided. The method includes forming a firstfield effect transistor (FET) device and a second FET device on asemiconductor substrate. The method includes epitaxially growing raisedsource/drain (RSD) structures for the first FET device at a firstheight. The method includes epitaxially growing raised source/drain(RSD) structures for the second FET device at a second height. Thesecond height is greater than the first height such that a thresholdvoltage of the second FET device is greater than a threshold voltage ofthe first FET device.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

FIG. 1 is a cross-sectional view of a semiconductor substrate having aplurality of transistor devices;

FIG. 2 is another view of the semiconductor substrate in FIG. 1.

FIG. 3 is an alternative embodiment of the semiconductor substrate shownin FIG. 1;

FIG. 4 is an another embodiment of the semiconductor substrate shown inFIG. 1;

FIG. 5 is a process flow diagram illustrating a process for creating thesemiconductor substrate as shown in FIGS. 1-4; and

FIGS. 6-11 are cross sectional views illustrating the exemplary forcreating the semiconductor substrate as described in FIG. 5, in which:

FIG. 6 illustrates a starting ETSOI substrate;

FIG. 7 illustrates the formation of a gate stack on the ETSOI substrateof FIG. 6;

FIG. 8 illustrates patterning of the gate stack of FIG. 7;

FIG. 9 illustrates the formation of sidewall spacers on the patternedgate stack of FIG. 8;

FIG. 10 illustrates the formation of epitaxially grown raisedsource/drain (RSD) regions of different heights for differenttransistors;

FIG. 11 illustrates ion implantation of the structures of FIG. 10; and

FIG. 12 illustrates formation of secondary side wall spacers on the gatestack and creation of silicide contacts on the gate stack on the RSDstructures.

DETAILED DESCRIPTION

The lack of effective channel doping in ETSOI devices results in a needfor producing transistors having different threshold voltages V_(t) byother non-doping techniques. One such technique is described inexemplary embodiments of the present disclosure, and involves creating asingle substrate having various transistors with a raised source drainconfiguration (RSD). The transistors as disclosed may be implemented ingate-first or gate-last approaches, and does not require changing thethickness of the ETSOI layer, the channel length, or the gate-dielectriclayers and their thicknesses. The single substrate includes varioustransistors having different threshold voltages. The transistors asdisclosed in the exemplary embodiments of the present disclosure do notrequire doped channels, thus avoiding a short channel penalty and dopantfluctuation variability. The single substrate as disclosed overcomes thecurrent challenge of creating different gate stack structures on asingle substrate to create different threshold voltages V_(t).

Referring now to FIG. 1, a cross-sectional view of an exemplarysemiconductor structure 10 is shown. The semiconductor structure 10(also referred to as an SOI wafer) may be used in an integrated circuitsuch as, for example, a system-on-a-chip (SOC) integrated circuit. Thesemiconductor structure 10 includes various transistors, two of whichare illustrated as transistor 22 and transistor 24. The transistors 22and 24 may be any type of field effect transistor (FET) such as, forexample, an NFET or PFET device, that is produced using extremely thinsilicon-on-insulator (ETSOI) fabrication technology. The transistors 22and 24 may be, for example, fully depleted devices, planar typetransistors such as transistors produced by a partially depleted SOIfabrication technology, or bulk-silicon devices. In the exemplaryembodiment as shown, the semiconductor structure 10 includes a substrate30, a buried oxide (BOX) layer 32, and an ETSOI layer 34 (alsoillustrated in FIG. 5). The BOX layer 32 may be constructed from anoxide, nitride, oxynitride or any combination thereof and an oxide suchas silicon dioxide (SiO₂).

In one embodiment, the ETSOI layer 34 has a thickness ranging from about1 nm to about 20 nm. In an alternative embodiment, the ETSOI layer 34may include a thickness ranging from about 3 nm to about 10 nm. In oneapproach, the semiconductor structure or SOI wafer 10 is formed bythinning a relatively thick SOI wafer (a wafer having a thickness ofabout 30 nm to about 90 nm) using oxidation and a hydrofluoric (HF) wetetch. The ETSOI layer 34 can be any semiconducting material, including,but not limited to, Si (silicon), strained Si, SiC (silicon carbide), Ge(geranium), SiGe (silicon germanium), SiGeC (silicon-germanium-carbon),Si alloys, Ge alloys, GaAs (gallium arsenide), InAs (indium arsenide),InP (indium phosphide), or any combination thereof.

The transistors 22 and 24 each include a gate 40, at least one gatedielectric layer (two of which are illustrated in FIG. 1 as 42 and 44),and spacers 46 located on opposing lateral sides 48 of the gate 40. Thegate 40 may be constructed from polysilicon or another conductingmaterial such as metal (e.g., metal alloys, metal silicides, metalcarbides, etc.). The dielectric layers 42 and 44 are placed along theETSOI layer 32, and the gate 40 rests on the dielectric layers 42 and44. The gate dielectric layers 42 and 44 may be constructed from amaterial such as, for example, silicon oxide, silicon oxynitride (SiON),a high-k dielectric material (e.g., a hafnium- or aluminum-basedmaterial), or a combination thereof. The gate 40 may be created usingconventional gate-first approaches, or alternatively, a replacementmetal gate flow approach. In one embodiment, the spacers 46 may beconstructed from an oxide.

The transistors 22 and 24 each include a raised source/drain (RSD)structures 50. The RSD structures 50 are epitaxially grown. Theepitaxially grown RSD structures 50 may be constructed from varioustypes of semiconductor material such as, for example, silicon-germanium(SiGe) or silicon carbide (SiC). Epitaxial growth occurs on a topsurface 54 of the ETSOI layer 34. When the chemical reactants arecontrolled and the system parameters set correctly, the depositing atomsarrive at the top surface 54 of the ETSOI layer 34 with sufficientenergy to move around on the surface and orient themselves to thecrystal arrangement of the atoms of the deposition surface. For example,an epitaxial film deposited on a [100] crystal surface (cut along the[100] plane) will take on a [100] orientation. If, on the other hand,the wafer has an amorphous surface layer, the depositing atoms have nosurface to align to and form polysilicon instead of single crystalsilicon. Silicon sources for the epitaxial growth include silicontetrachloride, dichlorosilane (SiH₂Cl₂), and silane (SiH₄). Thetemperature for this epitaxial silicon deposition is from about 550° C.to about 900° C. In one embodiment, doped RSD structures 50 may beformed through epitaxial growth of SiGe on the top surface 54 of theETSOI layer 34. The Ge content of the epitaxial grown SiGe ranges fromabout 5% to about 60% (by atomic weight). In another embodiment, the Gecontent of the epitaxial grown SiGe ranges from about 10% to about 40%.

The RSD devices 50 have an epitaxy height, where the transistor 22includes an epitaxy height H1 and the transistor 24 includes an epitaxyheight H2, measured from the top surface 54 of the ETSOI layer 34. Asseen in FIG. 1, the epitaxy height H1 is less than the epitaxy heightH2. Thus, the epitaxy height of the various RSD structures 50 located onthe semiconductor substrate 10 may vary, however the PC pitch (e.g., thepitch between two substantially parallel gates 40, which is indicated byreference number 52 in FIG. 2), the gate lengths L_(g), and the gateinsulator thicknesses T_(g) of the dielectric layers 42 and 44 remaingenerally constant between the transistors 22 and 24.

For example, in one illustrative embodiment, the semiconductor substrate10 could include various transistors, where a portion of the transistorshave an epitaxy height of about 12 nm, another portion of thetransistors have an epitaxy height of about 20 nm, and a remainingportion of the transistors have an epitaxy height about 30 nm. Inanother embodiment, a portion of the transistors have an epitaxy heightof about 12 nm, another portion of the transistors have an epitaxyheight of about 15 nm, and a remaining portion of the transistors havean epitaxy height of about 18 nm. In one embodiment, the epitaxy heightof the transistors may generally range from about 3 nm to about 35 nm,where the transistor 22 ranges from about 3 nm to about 30 nm, and thetransistor 24 ranges from about 6 to about 35 nm.

The RSD structures 50 may be created by one or more deposition processessuch as, for example, atomic layer deposition (ALD), molecular layerdeposition (MLD), chemical vapor deposition (CVD), low-pressure chemicalvapor deposition (LPCVD), plasma enhanced chemical vapor deposition(PECVD), high density plasma chemical vapor deposition (HDPCVD),sub-atmospheric chemical vapor deposition (SACVD), rapid thermalchemical vapor deposition (RTCVD), in-situ radical assisted deposition,high temperature oxide deposition (HTO), low temperature oxidedeposition (LTO), ozone/TEOS deposition, limited reaction processing CVD(LRPCVD), ultrahigh vacuum chemical vapor deposition (UHVCVD),metalorganic chemical vapor deposition (MOCVD), molecular beam epitaxy(MBE), physical vapor deposition, sputtering, plating, evaporation,spin-on-coating, ion beam deposition, electron beam deposition, laserassisted deposition, chemical solution deposition, or any combinationthereof.

The epitaxy heights of the RSD structures 50 may be varied by maskingvarious regions of the semiconductor substrate depending on the intendedepitaxy height of the RSD structures 50. Specifically, for example, thetransistor 22 may be masked first, and the RSD structure 50 of thetransistor 24 is allowed to epitaxially grow to the epitaxy height H2.Then, the masking is removed from the transistor 22, and the transistor24 is masked. The RSD structures 50 corresponding to the transistor 22are then epitaxially grown to the epitaxy height H1. In one embodiment,the RSD structures 50 may be in-situ doped (i.e., doped when grown).

After epitaxially growing the RSD structures 50, the semiconductorsubstrate 10 undergoes ion implantation. Ions are implanted into the RSDstructure 50 and the ETSOI layer 34, creating extension structures 60 ofthe RSD structures 50 within the ETSOI layer 34. It should be noted thatthe dopant ions, ion energy, tilt, and angle of implantation aresubstantially the same for both transistors 22 and 24 during ionimplantation. The gate 40 and the spacers 46 act as a mask during ionimplantation such that portions of the ETSOI layer 34 may not experiencesignificant ion implantation. These portions of the ETSOI layer 34 thatdo not experience significant ion implantation create a channel 62within the ETSOI layer 34 between the extension structures 60. Thesemiconductor substrate 10 may then undergo junction annealing toactivate the dopant within the extension structures 60. Some examples ofannealing processes include, for example, rapid thermal annealing,furnace annealing, flash lamp annealing, or a combination thereof.

An effective length of each channel 62 depends on the epitaxy height ofthe RSD structures 50. Specifically, the greater the epitaxy height ofthe RSD structure 50, the greater the effective length of the channel62. For example, the transistor 22 includes a channel length L_(eff1),and the transistor 24 includes a channel length L_(eff2). The epitaxyheight H2 of the transistor 24 is greater than the epitaxy height H1 ofthe transistor 22. Thus, the channel length L_(eff2) is greater than thechannel length L_(eff1). This is because as the epitaxy height of theRSD structures 50 increase, less ion implantation occurs within theETSOI layer 34, thereby creating a longer effective channel length.However, although the effective channel length varies, both transistors22 and 24 generally have about the same channel length, L_(g).

The effective channel length of the channel 62 will affect a thresholdvoltage V_(t) of the transistors 22 and 24. Specifically, a longereffective channel length will result in a relatively higher thresholdvoltage V_(t), and a shorter effective channel length will result in arelatively lower threshold voltage V_(t). For example, the transistor 22with the effective channel length L_(eff1) has a lower threshold voltageV_(t) than the transistor 24 with the effective channel length L_(eff2).Thus, the semiconductor substrate 10 will include various transistors(e.g., transistors 22 and 24) that have varying threshold voltagesV_(t), which may be required various SOC applications to meet differentperformance and power requirements.

FIG. 3 is an alternative embodiment of a semiconductor substrate 110having transistors 122 and 124. The transistors 122 and 124 each includea gate silicide contact 170 for gates 140, and silicide contacts 172 forRSD structures 150. The gate silicide contact 170 and the silicidecontacts 172 may be created by depositing a metal layer over the gates140 and the RSD structures 150, followed by an annealing process suchas, for example, rapid thermal annealing. During annealing, the metalreacts with silicon to form a metal silicide. The metal layer may be,for example, nickel, cobalt, titanium, platinum, or a combinationthereof. In the exemplary embodiment as shown in FIG. 2, the transistors122 and 124 may also include secondary spacers 176 that are placed overspacers 146. The secondary spacers 176 may be created by reactive ionetching (RIE).

FIG. 4 is another embodiment of a semiconductor substrate 210 havingtransistors 222 and 224. The transistors 222 and 224 each include a gatesilicide contact 270 for gates 240, and silicide contacts 272 for RSDstructures 250. In the embodiment as shown, the transistors 222 and 224also include RSD structures 250 having a faceted cross-section. That is,the RSD structures 250 have lateral sides 278 that are sloped or angled.

A method of creating the semiconductor substrate 10, 110 or 210 will nowbe described. Turning now to FIG. 5, a process flow diagram 300 isillustrated. Referring now to FIGS. 5-6, the method may begin at block302 by providing an ETSOI substrate 80 (shown in FIG. 5). The ETSOIsubstrate 80 includes the substrate 30, the BOX layer 32, and the ETSOIlayer 34. Method 300 may then proceed to block 304.

Referring now to FIGS. 5 and 7, in block 304 a gate stack 82 isdeposited over the ETSOI layer 34. The gate stack 82 may include a gatematerial 84, and various gate dielectric layers 86 and 88. Method 300may then proceed to block 306.

Referring now to FIGS. 5 and 8, in block 306, the gate 40 and thedielectric layers 42 and 44 are created by a conventional gatepatterning process. This also defines the gate length Lg. Although aconventional gate patterning process is discussed, it is to beunderstood that alternative approaches may be used as well to create thegate 40. For example, in another approach, a replacement metal gate flowprocess utilizing a sacrificial polysilicon gate may be used instead.Method 300 may then proceed to block 308.

Referring now to FIGS. 5 and 9, in block 308 the spacers 46 are added tothe lateral sides 48 of the gate 40. The spacers 46 may be constructedfrom an oxide, and are created using a selective anisotropic etchingprocess. Method 300 may then proceed to block 310.

Referring now to FIGS. 5 and 10, in block 310 the RSD structures 50 aregrown on the ETSOI layer 32 to different epitaxy heights. The RSDstructures 50 may be created by a deposition process as described above,where the epitaxy heights of the RSD structures 50 may be varied bymasking various regions of the semiconductor substrate depending on theintended epitaxy height of the RSD structures 50. In one embodiment asshown in FIG. 3, the RSD structures 250 are epitaxially grown to createa faceted cross-section. Method 300 may then proceed to block 312.

Referring to FIGS. 5 and 11, in block 312 the semiconductor substrate 10undergoes ion implantation. The semiconductor substrate 10 may thenundergo junction annealing to activate dopant within the extensionstructures 60. Method 300 may then proceed to block 314.

Referring now to FIGS. 3 and 12, in block 314 the secondary spacer 176may be added to the transistors 22 and 24 by a reactive ion etching(RIE) approach. It should be noted that block 314 is optional, and maybe omitted in some embodiments. Method 300 may then proceed to block316.

With continued reference to FIGS. 3 and 12, in block 316 the transistors122 and 124 each include silicide contacts 172 for the RSD structures150. The silicide contacts 172 may be created by depositing a metallayer such as, for example, nickel, cobalt, titanium, platinum, or acombination thereof over the gates 140 and the RSD structures 150,followed by an annealing process such as, for example, rapid thermalannealing. The gate silicide contact 170 may be included. The gatesilicide contact 170 is also created by depositing metal over the gate140, and followed by an annealing process. It should be noted that block316 is also optional, and may be omitted in some embodiments. Method 300may then terminate.

The terminology used herein is for the purpose of describing particularembodiments only and is not intended to be limiting of the invention. Asused herein, the singular forms “a”, “an”, and “the” are intended toinclude the plural forms as well, unless the context clearly indicatesotherwise. It will be further understood that the terms “comprises”and/or “comprising,” when used in this specification, specify thepresence of stated features, integers, steps, operations, elements,and/or components, but do not preclude the presence or addition of oneor more other features, integers, steps, operations, elements,components, and/or groups thereof.

The flowchart and block diagrams in the Figures illustrate thearchitecture, functionality, and operation of possible implementationsof systems, methods and computer program products according to variousembodiments of the present invention. In this regard, each block in theflowchart or block diagrams may represent a module, segment, or portionof code, which comprises one or more executable instructions forimplementing the specified logical function(s). It should also be notedthat, in some alternative implementations, the functions noted in theblock may occur out of the order noted in the figures. For example, twoblocks shown in succession may, in fact, be executed substantiallyconcurrently, or the blocks may sometimes be executed in the reverseorder, depending upon the functionality involved. It will also be notedthat each block of the block diagrams and/or flowchart illustration, andcombinations of blocks in the block diagrams and/or flowchartillustration, can be implemented by special purpose hardware andcomputer instructions.

The corresponding structures, materials, acts, and equivalents of allmeans or step plus function elements in the claims below are intended toinclude any structure, material, or act for performing the function incombination with other claimed elements as specifically claimed. Thedescription of the present invention has been presented for purposes ofillustration and description, but is not intended to be exhaustive orlimited to the invention in the form disclosed. Many modifications andvariations will be apparent to those of ordinary skill in the artwithout departing from the scope and spirit of the invention. Theembodiment was chosen and described in order to best explain theprinciples of the invention and the practical application, and to enableothers of ordinary skill in the art to understand the invention forvarious embodiments with various modifications as are suited to theparticular use contemplated.

1. A method of creating a semiconductor integrated circuit, comprising:forming a first field effect transistor (FET) device and a second FETdevice on a semiconductor substrate; epitaxially growing raisedsource/drain (RSD) structures for the first FET device at a firstheight; epitaxially growing raised source/drain (RSD) structures for thesecond FET device at a second height, wherein the second height isgreater than the first height such that a threshold voltage of thesecond FET device is greater than a threshold voltage of the first FETdevice; forming the gate structures of the first and second FET deviceson at least one gate dielectric layer of an extremely thinsilicon-on-insulator (ETSOI) substrate that is part of the semiconductorsubstrate, wherein a gate length of the second FET device is the same asa gate length of the first FET device; and implanting ions within theETSOI layer, wherein the gate structures act as a mask as ions areimplanted such that an effective channel length of the second FET deviceis longer than an effective channel length of the first FET device, andsuch that extension structures of the first FET device extend furtherbeneath the gate structure thereof in a lateral direction with respectto extension structures of the second FET device.
 2. The method of claim1, further comprising masking the RSD structures for the first FETdevice for a duration of time while growing the RSD structures for thesecond FET device so as to achieve the second height being greater thanthe first height. 3-5. (canceled)
 6. The method of claim 1, whereindopant ions, ion energy, tilt and angle of implantation aresubstantially the same for both the first and second FET devices as ionsare implanted.
 7. The method of claim 1, further comprising creating afirst set of spacers disposed on lateral sides the gate structures by aselective anisotropic etching process.
 8. The method of claim 7, furthercomprising creating a second set of spacers disposed on lateral sides ofthe gate structures over the first set of spacers, the second set ofspacers created by reactive ion etching (RIE).
 9. The method of claim 1,further comprising creating a gate silicide contact for the gatestructures by depositing a metal over the gate structures, and annealingthe metal.
 10. The method of claim 1, further comprising epitaxiallygrowing the RSD structures of the first and second FET devices by one ormore deposition processes.
 11. The method of claim 1, further comprisingepitaxially growing the RSD structures of the first and second FETdevices to create a faceted cross-section.
 12. The method of claim 1,further comprising creating a silicide contact for each the RSDstructures of the first and second FET devices by depositing a metalover the RSD structures of the first and second FET devices, andannealing the metal.